In this book, the fundamentals of micro- and nanofabrication are described on the basis of the concept of “using gases as a fabrication tool.” Unlike other books available on the subject,this volumeassumes only entry-level mathematics, physics, and chemistry of undergraduates or high-school students in science and engineering courses.Necessary theories are plainly explained to help the reader learn about this new attractive field and enable further reading of specialized books. The book is an attractive guide for students, young engineers, and anyonegetting involved in micro- and nanofabrication from various fields including physics, electronics, chemistry, and materials sciences.